Parallel laser micromachining based on diffractive optical elements with dispersion compensated femtosecond pulses
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Other documents of the author: Torres Peiró, Salvador; González Ausejo, Jennifer; Mendoza-Yero, Omel; Mínguez-Vega, Gladys; Andrés, Pedro; Lancis, Jesús
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Show full item recordcomunitat-uji-handle:10234/9
comunitat-uji-handle2:10234/43662
comunitat-uji-handle3:10234/43643
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Title
Parallel laser micromachining based on diffractive optical elements with dispersion compensated femtosecond pulsesAuthor (s)
Date
2013Publisher
Optical Society of AmericaISSN
1094-4087Type
info:eu-repo/semantics/articleVersion
info:eu-repo/semantics/publishedVersionSubject
Abstract
We experimentally demonstrate multi-beam high spatial
resolution laser micromachining with femtosecond pulses. The effects of
chromatic aberrations as well as pulse stretching on the material processed
due to ... [+]
We experimentally demonstrate multi-beam high spatial
resolution laser micromachining with femtosecond pulses. The effects of
chromatic aberrations as well as pulse stretching on the material processed
due to diffraction were significantly mitigated by using a suited dispersion
compensated module (DCM). This permits to increase the area of
processing in a factor 3 in comparison with a conventional setup.
Specifically, 52 blind holes have been drilled simultaneously onto a
stainless steel sample with a 30 fs laser pulse in a parallel processing
configuration. [-]
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Optics Express, 2013, Vol. 21, No. 26 |Rights
©2013 Optical Society of America
"This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/oe/fulltext.cfm?uri=oe-21-26-31830&id=276137 Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law".
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