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Parallel laser micromachining based on diffractive optical elements with dispersion compensated femtosecond pulses
Torres Peiró, Salvador; González Ausejo, Jennifer; Mendoza-Yero, Omel; Mínguez-Vega, Gladys; Andrés, Pedro; Lancis, Jesús Optical Society of America (2013)We experimentally demonstrate multi-beam high spatial resolution laser micromachining with femtosecond pulses. The effects of chromatic aberrations as well as pulse stretching on the material processed due to diffraction ...