Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts
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Mostrar el registro completo del ítemcomunitat-uji-handle:10234/9
comunitat-uji-handle2:10234/7013
comunitat-uji-handle3:10234/8638
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Título
Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contactsAutoría
Fecha de publicación
2018-09-24Editor
AIP PublishingISSN
0003-6951; 1077-3118Cita bibliográfica
AMORESI, Rafael A. C., et al. Direct preparation of standard functional interfaces in oxide heterostructures for 2DEG analysis through beam-induced platinum contacts. Applied Physics Letters, 2018, vol. 113, no 13, p. 131603Tipo de documento
info:eu-repo/semantics/articleVersión de la editorial
https://aip.scitation.org/doi/abs/10.1063/1.5046093Versión
info:eu-repo/semantics/publishedVersionPalabras clave / Materias
Resumen
Two-dimensional electron gas (2DEG) in SrTiO3/LaAlO3 heterostructures has been extensively studied in the last few years; however, little attention has been given to a practical way to contact electrically the low ... [+]
Two-dimensional electron gas (2DEG) in SrTiO3/LaAlO3 heterostructures has been extensively studied in the last few years; however, little attention has been given to a practical way to contact electrically the low dimensional gas at the interface. This work demonstrates a method to contact the 2DEG formed at the oxide interfaces connected by platinum electrodes which were made by the decomposition of organometallic gas using focused ion beams. On the surface, the electrodes were defined through photolithography, and at the interface, the electrodes were deposited through the focused ion beams and electrons, which were then evaluated. The quality of the interface electrodes was evaluated at two different partial oxygen pressures (pO2) used for the film deposition: low (10−4 mbar) and high (10−1 mbar). The electrode deposition conditions using electrons or ions have resulted in different rates of metal deposition and interaction with the interface leading to either metallic (2DEG) or insulating behavior. [-]
Publicado en
Applied Physics Letters, 2018, vol. 113, no 13Proyecto de investigación
Grant CEPID/CDMF-Sao Paulo Research Foundation-FAPESP: 2013/072962, 2014/01371-5, 2017/23663-6, 2017/13024-6; National Council for Scientific and Technological Development (CNPq) ;Generalitat Valenciana: Prometeo/2016/079; Generalitat Valenciana: Prometeo/2016/079; Universitat Jaume I: UJI-B2016-25Derechos de acceso
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