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Enhancement of optical absorption by modulation of the oxygen flow of TiO2 films deposited by reactive sputtering
Beltran, Armando; Pereira, André L. J.; Lisboa Filho, Paulo N.; Acuña, Javier; Brandt, Iuri S.; Pasa, André A. American Institute of Physics (AIP) (2012)Oxygen-deficient TiO2 films with enhanced visible and near-infrared optical absorption have been deposited by reactive sputtering using a planar diode radio frequency magnetron configuration. It is observed that the increase ...